Acoustic consumption monitor

摘要

A method of determining the reaction efficiency of a Chemical Vapor Deposition reactor whereby a gas combination enters the reactor and a solid reaction product is deposited as a thin film contained in the reactor. According to the invention, the inlet's composition of the gas combination is controlled or can be measured and a measuring device, such as an acoustic gas composition analyzer, calculates the outlet's gas composition. From these parameters and known information pertaining to the reaction chemistry, the reaction efficiency can be deduced. In addition, the reaction efficiency allows the growth rate of the thin film to be determined as well as the associated rates of the products exhausted from the reactor.