| 摘要 |
An SH wave position-sensing device comprising two SH wave transducing units X and Y, a nonpiezoelectric plate and a signal controller. Each unit contains piezoelectric substrates PT0, PR0, PTi (i=1, 2, . . . , N) and PRi (i=1, 2, . . . , N), interdigital transducers T0, R0, Ti (i=1, 2, . . . , N) and Ri (i=1, 2, . . . , N). The interdigital transducers T0, R0, Ti and Ri, are formed on an upper- or a lower end surface of the piezoelectric substrates PT0, PR0, PTi and PRi, respectively. The lower end surface of each piezoelectric substrate is cemented on an upper end surface of the nonpiezoelectric plate. The finger direction of each interdigital transducer Ri is slanting to that of each interdigital transducer Ti. When an electric signal is applied to the interdigital transducer T0, an SH wave is excited in a bilayer zone BT0 formed by the piezoelectric substrate PT0 and the nonpiezoelectric plate, transmitted to a bilayer zone BR0 formed by the piezoelectric substrate PR0 and the nonpiezoelectric plate, and transduced to an electric signal with a phase theta base and delivered at the interdigital transducer R0.
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