| 摘要 |
<p>PROBLEM TO BE SOLVED: To easily obtain a groove having a desired sectional shape at a high speed simply by scanning the longitudinal direction of the groove with a laser beam. SOLUTION: This grooving method consists in forming the groove 16 on a work piece 15 by irradiating the work piece 15 with the laser 11. When the longitudinal direction of the groove 16 to be formed is defined as an x axis and the transverse direction as a y-axis, the integration g(y) relating to x of the intensity distribution f(x, y) of the irradiation region Q of the laser on the work piece is so set as to be proportioned to the depth distribution d(y) of the groove 16 to be formed. The laser 11 is transmitted through a mask pattern 12a having a prescribed transmissivity distribution, by which this intensity distribution f(x, y) is formed. The high-strength materials is scanned in the x-axis direction, by which the groove 16 is formed. The sectional shape of the groove 16 may be determined by the shape of the mask pattern 12a. The formation of the groove 16 having the prescribed sectional shape by one time of the scanning in the x-axis direction is made possible.</p> |
