| 发明名称 |
Antireflective coating compositions |
| 摘要 |
The invention provides new light absorbing crosslinking compositions suitable for use as an antireflective composition (ARC), particularly for deep UV applications. The ARCs of the invention in general comprise a crosslinker and novel ARC resin binders that effectively absorb reflected deep UV exposure radiation.
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| 申请公布号 |
US5886102(A) |
申请公布日期 |
1999.03.23 |
| 申请号 |
US19960665019 |
申请日期 |
1996.06.11 |
| 申请人 |
SHIPLEY COMPANY, L.L.C. |
发明人 |
SINTA, ROGER F.;ADAMS, TIMOTHY G.;MORI, JAMES MICHAEL |
| 分类号 |
G03F7/11;C09D5/00;C09D7/12;C09D133/14;C09D201/02;G02B1/11;G03F7/09;H01L21/027;(IPC1-7):G03F7/11;C08L33/04;C08L33/08;C08L33/10 |
主分类号 |
G03F7/11 |
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