摘要 |
The present invention relates a method of manufacturing a monolithic thermal fluid jet nozzle for the electronically controlled propulsion of fluids characterized by the steps of arranging said nozzle on a substrate on which at least one dielectric layer and at least one layer of metal or metal strip have been deposited; removing at least part of the deposited metal layer, leaving chancels adjacent to said at least dielectric layer or in-between dielectric layers, for the transportation of fluids; applying at least one heating element to the channel for fluid propulsion, which element superheats the fluid to form a vapour bubble which ejects at least part of the surrounding fluid through the nozzle. |