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发明名称
METHOD FOR FABRICATING A FINE HOLE STRUCTURE
摘要
申请公布号
KR0165523(B1)
申请公布日期
1999.03.20
申请号
KR19960020353
申请日期
1996.06.07
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
CHOE, WAN-WUK;KWAN, OH-KEUN
分类号
G03F7/00;(IPC1-7):G03F7/00
主分类号
G03F7/00
代理机构
代理人
主权项
地址
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