Capacitive acceleration sensor for automobile passenger restraint device
摘要
The acceleration sensor has a carrier (1) with a pair of flexure springs (5) supporting a seismic mass (4) displaced parallel to a pair of finger electrodes (2,3) attached to the carrier, which cooperate with the seismic mass to provide a difference capacitor. The bearing points (6), the flexure springs, the seismic mass and the electrodes are formed from 2 successive structured metal layers (7) applied to the carrier layer.
申请公布号
DE19750134(C1)
申请公布日期
1999.03.18
申请号
DE1997150134
申请日期
1997.11.13
申请人
TECHNISCHE UNIVERSITAET DRESDEN, 01069 DRESDEN, DE
发明人
QU, WENMIN, DR.-ING., 01069 DRESDEN, DE;WENZEL, CHRISTIAN, DR.RER.NAT., 01239 DRESDEN, DE;DRESCHER, KURT, PROF. DR.-ING.HABIL., 01324 DRESDEN, DE
