METHOD AND APPARATUS FOR CONTROLLING A WORKPIECE IN A VACUUM CHAMBER,申请号WO1998US17997-传众专利搜索

发明名称	METHOD AND APPARATUS FOR CONTROLLING A WORKPIECE IN A VACUUM CHAMBER
摘要	An apparatus used to control a workpiece (18) inside a vacuum chamber (24). The workpiece (18) is supported on a workpiece holder (10) in the vacuum chamber (24). The workpiece (18) is rotated about an X axis, translated back and forth along the Y direction of an X-Y plane on the surface of the workpiece holder (10), and rotated in the X-Y plane about its Z axis.
申请公布号	WO9913488(A1)	申请公布日期	1999.03.18
申请号	WO1998US17997	申请日期	1998.09.03
申请人	ORION EQUIPMENT, INC.;SMICK, THEODORE, H.;RYDING, GEOFFREY;FARLEY, MARVIN	发明人	SMICK, THEODORE, H.;RYDING, GEOFFREY;FARLEY, MARVIN
分类号	C23C14/48;H01J37/317;H01L21/265;H01L21/677;H01L21/68;(IPC1-7):H01J37/00	主分类号	C23C14/48
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