发明名称 MANUFACTURING PROCESS CHANGE CONTROLLER AND MANUFACTURING PROCESS CHANGE CONTROLLING METHOD
摘要 PROBLEM TO BE SOLVED: To quickly judge whether to take measures for a change point by providing a comparative judgment means which statistically compares and judges information before and after the change point at every changing item extracted by an information extraction storage means. SOLUTION: A related history extractor 11 extracts and records comparative process data of either one fitted first out of a test number or a test term before and after the change data which are registered in a change control target registration device 10 from a product history controller and a facility history controller. A comparative judgment device 12 tests the significance difference before and after the change data by a statistical method by a test method registered in the change control target registration device 10, and when there is significance difference, the name of the change point and the test results are sent to a judgment result output device 13. The judgment result output device 13 outputs the contents of the test result and the alarm to a display 13a and at the same time lets a buzzer 13b to sound and alarm sound.
申请公布号 JPH1170445(A) 申请公布日期 1999.03.16
申请号 JP19970235204 申请日期 1997.08.29
申请人 NEC KYUSHU LTD 发明人 INADA MASAYOSHI
分类号 B23Q41/08;B65G61/00;G05B15/02;G05B19/418;G05B23/02;G06Q50/00;G06Q50/04;H01L21/02 主分类号 B23Q41/08
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