SEMICONDUCTOR SURFACE EVALUATING METHOD AND DEVICE BY SURFACE PHOTOVOLTAGE,申请号JP19970235007-传众专利搜索

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发明名称	SEMICONDUCTOR SURFACE EVALUATING METHOD AND DEVICE BY SURFACE PHOTOVOLTAGE
摘要
申请公布号	JPH1174325(A)	申请公布日期	1999.03.16
申请号	JP19970235007	申请日期	1997.08.29
申请人	KOBE STEEL LTD;TOHOKU KOGYO UNIV	发明人	MUNAKATA TADASUKE;TAKAMATSU HIROYUKI
分类号	G01R31/302;G01N27/00;G01N27/60;H01L21/66;(IPC1-7):H01L21/66	主分类号	G01R31/302
代理机构		代理人
主权项
地址

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