| 摘要 |
PROBLEM TO BE SOLVED: To prevent characteristic deterioration caused by titanium and others, which constitute electrode wiring contacting to the upper electrode of a capacitance element, invade capacitor insulation film and react. SOLUTION: On a substrate 1, a lower electrode 2, a capacitor insulation film 3, an insulation film 5 for coating, and the first partial film 7a on an upper electrode 7 which fills the second opening 6 (an opening for regulating capacitance) which is formed in the insulation film 5. A capacitor element is composed of the lower electrode 2, the capacitor insulation film 3, and the first partial film 7a. The upper electrode 7 includes the first partial film 7a which contacts a capacitor insulation film 5, and the second partial film 7b which does not contact the film 5. The second electrode wiring 11, having a lower film 11a of titanium and an upper film 11b of aluminum alloy, contacts the second partial film 7b away from the first partial film 7a of the upper electrode 7. The diffusion of the titanium and others which invade from the second electrode wiring 11 to the capacity insulation film 5 can be prevented. |
