发明名称 PRODUCTION OF SEMICONDUCTOR FILM FOR SOLAR CELL AND SOLAR CELL USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a method for producing stably and at a low cost a semiconductor film for solar cell which has a high quality and uniform thickness. SOLUTION: This production method includes a step for forming a material layer containing semiconductor material on the surface of a heat resistant supporting board, a step for arranging a substrate 10 to which the supporting board and a semiconductor film are provided, so as to be close to the material layer while the material layer faces the surface of the substrate, and a step for vaporizing a semiconductor material in the material layer by heating the material layer and substrate to form semiconductor films 1, 2 and 3 on the substrate 10, and the material layer contains powdery additives whose composition is stable in the heating step.
申请公布号 JPH1174549(A) 申请公布日期 1999.03.16
申请号 JP19970232733 申请日期 1997.08.28
申请人 MATSUSHITA DENCHI KOGYO KK 发明人 HANABUSA AKIRA;OYAMA HIDEAKI;HIGUCHI HIROSHI;MUROZONO MIKIO;KUMAZAWA SEIJI
分类号 H01L31/04 主分类号 H01L31/04
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