发明名称 METHOD AND DEVICE FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To control manufacturing by a tape carrier itself. SOLUTION: An integrated manufacturing device for COB (chip-on-board package)Ics.has a loading device 2, a chip bonding device 3, an information display device 4, a curing device 5, a wire bonding device 6, a buffer 7, a transfer molding device 40, a residue removing device 8, and an unloading device 9. These devices are arranged in series. The information display device 4 displays a start display hole 71 for displaying the start, an end display hole 79 for displaying end, a change display hole 78 for displaying the changes of kinds or materials and the lot, a defect display hole 72 for displaying defects, a pitch display hole 73 for displaying pitch, and a joint display hole 76 for displaying a joint 75 by adhesive tapes of a tape carrier 11. Thus, the holding of the joint in molding a forming block by the detection of the joint display hole can be prevented at the time of formation, and the leaking of resin can be avoided.
申请公布号 JPH1174412(A) 申请公布日期 1999.03.16
申请号 JP19970249998 申请日期 1997.08.28
申请人 HITACHI LTD;HITACHI TOKYO ELECTRON CO LTD;HITACHI TOBU SEMICONDUCTOR LTD 发明人 MORIGUCHI HIROSHI;ENDO TSUNEO;NAKAJIMA KOICHI
分类号 H01L21/60;H01L21/56;H01L23/12;H01L23/14;H01L23/50;(IPC1-7):H01L23/12 主分类号 H01L21/60
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