| 摘要 |
PROBLEM TO BE SOLVED: To prevent an atmosphere converted between previous and subsequent processes from leaking, by providing a receiving path and a feeding path of a spherical object to be processed on a supporting device, providing an atmosphere exhaust tube connected to a storage chamber of the object of a rotary hermetic distribution, and providing an atmosphere supply tube connected to the storage chamber on a side for feeding the object. SOLUTION: A rotary hermetic distributor 1 is rotated, and when a position of a storage chamber 4 aligns with a position of an object supply path 14 for processing and an atmosphere exhaust path 18, an object 3 is received for processing from a receiving path 12 into the storage chamber 4, and an atmosphere in the storage chamber 4 is pumped toward an atmosphere exhaust tube 16 to leave no atmosphere of a previous process. On the other hand, when the position of the storage chamber 14 aligns with a position of a processed object transfer path 15 and an atmosphere supply tube 17, gas or the like to be used in a next process is blown from the supply tube 17 from an atmosphere supply path 19 into the storage chamber 14. At the same time, the processed object 3 in the storage chamber 14 is fed from the transfer path 15 to a feeding path 13. Thus, sealability for the atmosphere can be improved without the atmosphere used in the previous process mixed. |
