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发明名称
Method for forming an insulating layer
摘要
申请公布号
EP0607691(B1)
申请公布日期
1999.03.10
申请号
EP19930310326
申请日期
1993.12.20
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
YAMADA, SHINJI;SHIRAI, MASAHARU
分类号
H01L21/312;G03F7/16;H05K3/28;(IPC1-7):G03F7/00;H05K3/00
主分类号
H01L21/312
代理机构
代理人
主权项
地址
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