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经营范围
发明名称
WAFER CLEANING DEVICE
摘要
申请公布号
JPH1167710(A)
申请公布日期
1999.03.09
申请号
JP19970220311
申请日期
1997.08.15
申请人
SONY CORP
发明人
KOHAMA SADAHIRO;KUROSAWA KIYOSHI
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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