| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a secondary ion mass spectrometry method with a positive mode, which can suppress electrostatic charge of a specimen by a simple and practical means in which preliminary treatment of a specimen is not carried out, when analyzing an insulating specimen by using a secondary ion mass spectrometer with a double-focussing type mass spectrometer. SOLUTION: Electrostatic charge on the surface of a specimen 2 due to the irradiation of primary ions is suppressed by irradiating an electron beam 7 with an incident energy of 1.5-2.5 keV onto an area wrapping in the primary ion irradiation area. A part of a secondary ion 6 emitted from the surface of the specimen 2 hits a surface of an extracting electrode 8 facing the specimen, and thereby the secondary ions emitted from the secondary ion extracting electrode 8 is injected onto the surface of the specimen 2 with an incident energy of 0.5-1.5 keV.</p> |
