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发明名称
Refillable ampule and method re same
摘要
A highly reliable bulk chemical delivery system for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.
申请公布号
US5878793(A)
申请公布日期
1999.03.09
申请号
US19970814924
申请日期
1997.03.12
申请人
SIEGELE, STEPHEN H.;NOAH, CRAIG M.;GREGG, JOHN N.
发明人
SIEGELE, STEPHEN H.;NOAH, CRAIG M.;GREGG, JOHN N.
分类号
B01J4/00;B01L3/08;B67D7/02;B67D7/84;C23C16/44;C23C16/448;F17C1/00;F17C5/00;F17C5/02;F17C6/00;F17C7/00;F17C9/00;F17C13/02;F17C13/04;G01F23/24;G05D9/12;(IPC1-7):F17C13/00
主分类号
B01J4/00
代理机构
代理人
主权项
地址
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