Method of forming hard carbon film over inner surface of cylindrical member

摘要

A cylindrical member having a center bore is disposed in a vacuum vessel provided with a gas inlet port and a gas outlet port, and an auxiliary electrode is inserted into the center bore of the cylindrical member along the central axis thereof so as to extend to substantially an entire length of the center bore, thereby permitting the auxiliary electrode to be grounded or having a positive DC voltage applied to the auxiliary electrode. A gas containing carbon is supplied into the vacuum vessel through the gas inlet port after the vacuum vessel is evacuated and a voltage is applied to the cylindrical member to produce a plasma in the vacuum vessel including an inside of the center bore of the cylindrical member, thereby forming a hard carbon film over the inner surface of the cylindrical member by a plasma CVD process.