发明名称 |
Semiconductor device having wiring self-aligned with shield structure and process of fabrication thereof |
摘要 |
A semiconductor integrated circuit device has circuit components, a wiring arrangement electrically connected to the circuit components and a shield structure for preventing signal wirings from a cross-talk between the signal wirings, and the signal wirings are patterned from a conductive layer extending over grooves formed in the shield structure so as to be self-aligned with the shield structure.
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申请公布号 |
US5880024(A) |
申请公布日期 |
1999.03.09 |
申请号 |
US19950570241 |
申请日期 |
1995.12.11 |
申请人 |
NEC CORPORATION |
发明人 |
NAKAJIMA, TSUTOMU;HAYASHI, YOSHIHIRO |
分类号 |
H05K9/00;H01L21/311;H01L21/3205;H01L21/768;H01L23/52;H01L23/522;H01L23/532;H05K1/02;H05K3/10;(IPC1-7):H01L21/461 |
主分类号 |
H05K9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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