| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature-sensitive magnetic thin film having superior heat responsiveness and exhibits markedly temperature dependence. SOLUTION: A sputtered thin film STF is formed on a silicon substrate by performing RF sputtering, using a temperature-sensitive ferrite TSF as a target (process S2). Then the thin film STF is set in a tank containing oxygen, and argon gas is injected into the tank while the thin film STF is being heated (process S4). Thereafter, the thin film STF is cooled at a rate of 70 deg.C/hour (process S5). As a result, a temperature-sensitive magnetic thin film TMF having a spinel structure is manufactured. |
