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发明名称
摘要
申请公布号
JP2867402(B2)
申请公布日期
1999.03.08
申请号
JP19880321362
申请日期
1988.12.20
申请人
SEIKOO EPUSON KK
发明人
TAKENAKA SATOSHI
分类号
C30B1/02;H01L21/20;H01L21/263;H01L21/336;H01L29/786;(IPC1-7):H01L21/20
主分类号
C30B1/02
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