| 摘要 |
PROBLEM TO BE SOLVED: To easily place a quartz crystal blank at a specified position on a stage, when a quartz crystal blank is placed, and to easily release it from the stage at picking up. SOLUTION: Relating to a flaw detection of a quartz crystal blank 1, a diffused oblique ray is emitted from a light-emitting diode 6 from below the quartz crystal blank 1, and the light reflected on the flaw of the quartz crystal blank 1 is detected with an imaging means 11 just above the quartz crystal blank 1. The quartz crystal blank 1 is carried in by a transportation robot arm 15 on a stage 2, and carried out after inspection. Multiple grooves are formed on a placement surface 3 of the stage 2. By this, the quartz crystal blank 1 does not slip on the stage 2 when placing, while it does not adhere to the stage 2 after placement. |
