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发明名称
TURBO-MOLECULAR PUMP
摘要
申请公布号
JPH1162880(A)
申请公布日期
1999.03.05
申请号
JP19970231754
申请日期
1997.08.13
申请人
SEIKO SEIKI CO LTD
发明人
OKADA TAKASHI
分类号
F04D19/04;F04D29/58;(IPC1-7):F04D19/04
主分类号
F04D19/04
代理机构
代理人
主权项
地址
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