| 摘要 |
PROBLEM TO BE SOLVED: To inspect a piezoelectric element formed, on the opposite sides thereof, with at least one main electrode and at least one extraction electrode connected therewith, respectively, while supporting the element at an area other than the electrode, before it is sealed in a package or a case by connecting a contact pin with the extraction electrode to inspect the characteristics. SOLUTION: The inspection equipment comprises a base 20, and a sample stage 21 holding a quartz oscillator 10. The inspection equipment further comprises a plurality of probe pins 22 for electric connection with the quartz oscillator 10, a mechanism 24 for holding the probe pin 22 movably up and down along a post 23 and incorporating aπcircuit for matching connected with the probe pin 22, and a network analyzer 25 for characteristic test being connected with the probe pin 22 through theπcircruit. The network analyzer 25 can measure the equivalent parameters of the quartz oscillator 10, e.g. capacitance, inductance, and the like, in addition to the resonance frequency and crystal impedance and can measure the drive level dependency, or the like, by varying the current being supplied to the quartz oscillator 10.
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