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发明名称
SPUTTERING DEVICE AND SPUTTERING
摘要
申请公布号
JPH1161403(A)
申请公布日期
1999.03.05
申请号
JP19970223660
申请日期
1997.08.20
申请人
MITSUBISHI ELECTRIC CORP;RYODEN SEMICONDUCTOR SYST ENG KK
发明人
NISHIMOTO SUSUMU;KUBOTA MUTSUMI;YAMAMURA TOSHIHIRO
分类号
C23C14/34;C23C14/54;H01L21/203;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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