| 摘要 |
<p>PROBLEM TO BE SOLVED: To make various kinds of performance required in a storage container consistent with one another by using aliphatic polyketone resin which is semicrystalline resin as a material of the container. SOLUTION: This semiconductor wafer storage container 1 comprises a case 3 for receiving wafer storage frames 2 for individually separating and supporting a plurality of semiconductor wafers, a lid 4 of the case and a wafer pressing jig 5 or the like. The wafer storage frame 2 comprises opposite side walls 21a, 21b, a side end wall 22 and a bridge support 23, wherein grooves 25a, 25b are oppositely cut to receive the disk-like semiconductor wafers arranged in a A-direction. The case 3 receives the wafer storage frame 2. The semiconductor wafer storage container 1 is made of resin mainly containing aliphatic polyketone, wherein since the aliphatic polyketone is semicrystalline, it isotropically shrinks after molding, a shape may not vary in a high temperature atmosphere or with chemical used, the resin is excellent in impact strength at a low temperature, and outgassing from the resin can be reduced.</p> |
