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发明名称
FABRICATION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH1154499(A)
申请公布日期
1999.02.26
申请号
JP19970205743
申请日期
1997.07.31
申请人
OKI ELECTRIC IND CO LTD
发明人
TAKAHASHI MASASHI
分类号
H01L21/316;H01L21/76;(IPC1-7):H01L21/316
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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