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发明名称
ION IMPLANTING DEVICE HAVING ANALYSIS MAGNET WHOSE MAGNETIC FIELD IS OFFSET BY PERMANENT MAGNET
摘要
申请公布号
JPH1154080(A)
申请公布日期
1999.02.26
申请号
JP19970220623
申请日期
1997.07.31
申请人
NEC CORP
发明人
IWATSUKI TOSHIAKI
分类号
C23C14/48;G21K1/093;H01J37/05;H01J37/317;H01L21/265;(IPC1-7):H01J37/317
主分类号
C23C14/48
代理机构
代理人
主权项
地址
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