| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent occurrence of particles due to collision between substrates, and occurrence of substrate detection failure or damage of substrate due to tilted substrate, when the attitude of the substrates is changed, by positioning a plurality of substrates contained in a cassette at predetermined array intervals by substrate positioning means. SOLUTION: Substrate positioning members 35(1) and 35(2) are provided for positioning substrates W inserted in a cassette 10. When the attitude of the cassette 10 is changed, the substrates W are positioned by the substrate positioning members 35(1) and 35(2) at the predetermined array intervals. Accordingly, when the attitude of the cassette 10 is changed, the collision between the substrates W can be prevented. By this arrangement, the occurrence of particles due to collision between the substrates can be prevented, and further, as the substrates do not tilt when attitude change has been completed, the substrate detection failure or damage due to tilted substrates can be prevented.</p> |
