METHOD FOR WASHING SUBSTRATE,申请号JP19970203661-传众专利搜索

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发明名称	METHOD FOR WASHING SUBSTRATE
摘要
申请公布号	JPH1147700(A)	申请公布日期	1999.02.23
申请号	JP19970203661	申请日期	1997.07.30
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	OGASAWARA KAZUHISA
分类号	B08B1/04;B08B3/02;H01L21/304;(IPC1-7):B08B1/04	主分类号	B08B1/04
代理机构		代理人
主权项
地址

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