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发明名称
METHOD AND APPARATUS FOR STERILIZING PIPING
摘要
申请公布号
JPH1147754(A)
申请公布日期
1999.02.23
申请号
JP19970220624
申请日期
1997.07.31
申请人
NEC CORP
发明人
UCHIYAMA KENTARO
分类号
C02F1/20;C02F1/50;H01L21/304;(IPC1-7):C02F1/50
主分类号
C02F1/20
代理机构
代理人
主权项
地址
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