发明名称 |
Method of sputtering an amorphous carbon overcoat as a protective film on magnetic recording disk |
摘要 |
A thin-film magnetic recording media is prepared which contains a carbon overcoat sputtered on a magnetic recording layer. The carbon overcoat is sputtered on the magnetic recording layer using a sputtering process which is conducted in a sputtering chamber having an inert gas and a mixture of nitrogen gas and hydrogen gas, wherein said nitrogen gas and hydrogen gas are provided at a mole ratio of nitrogen/hydrogen between about 0.5 and about 1. The hydrogen and nitrogen doped amorphous carbon overcoat exhibits excellent mechanical properties and tribological performance.
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申请公布号 |
US5873984(A) |
申请公布日期 |
1999.02.23 |
申请号 |
US19970964525 |
申请日期 |
1997.11.05 |
申请人 |
TRACE STORAGE TECH. CORP. |
发明人 |
CHENG, FU-WEN;LIANG, JAMES;HUNG, TAIN-WONG;LIANG, HUNG-HUEI |
分类号 |
C23C14/06;G11B5/72;G11B5/84;(IPC1-7):C23C14/35 |
主分类号 |
C23C14/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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