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经营范围
发明名称
MAGNETRON SPUTTERING DEVICE
摘要
申请公布号
KR0174988(B1)
申请公布日期
1999.02.18
申请号
KR19950056602
申请日期
1995.12.26
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
LEE, JUNG-HEE;EUM, HYUN-ILL
分类号
C23C14/35;(IPC1-7):C23C14/35
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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