发明名称 |
SINGLE SUBSTRATE LOAD LOCK WITH OFFSET COOL MODULE AND BUFFER CHAMBER |
摘要 |
A load lock and related method of handling a substrate involve placing a substrate onto a vertically movable poppet and moving the poppet between two vertically opposed subchambers such that in moving the poppet toward one of the subchambers, that subchamber is sealed to atmosphere. The two subchamber system allows one substrate to be placed into a buffer and another substrate to be cooled at the same time. Also, the system allows for a slow vacuum to be made on the substrate in a subchamber to avoid undesirably loading the substrate by the otherwise immediate drop in pressure. |
申请公布号 |
WO9907912(A2) |
申请公布日期 |
1999.02.18 |
申请号 |
WO1998US14308 |
申请日期 |
1998.07.10 |
申请人 |
BROOKS AUTOMATION, INC. |
发明人 |
THERIAULT, VICTOR, J.;IVES, MARK |
分类号 |
H01L21/00;H01L21/677 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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