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发明名称
VERFAHREN ZUM ERREICHEN KONTROLLIERTER ABLAGERUNGSPROFILE IN SILIZIUMWUFERN
摘要
申请公布号
AT176084(T)
申请公布日期
1999.02.15
申请号
AT19920900331T
申请日期
1991.11.11
申请人
MEMC ELECTRONIC MATERIALS S.P.A.
发明人
FALSTER, ROBERT;FERRERO, GIANCARLO;FISHER, GRAHAM;OLMO, MASSIMILIANO;PAGANI, MARCO
分类号
C30B33/02;H01L21/02;H01L21/26;H01L21/322;H01L21/324;(IPC1-7):H01L21/322
主分类号
C30B33/02
代理机构
代理人
主权项
地址
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