| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-performance illuminator which can highly efficiently illuminate a circular-arcuate area to be illuminated and can make the numerical apertures of X-rays in the area nearly uniform regardless of illuminating positions. SOLUTION: Pumping energy light 5 emitted from a pumping energy light generating section 1 is projected upon a plurality of different spots on a target member 2. When the light 5 is projected upon the spots, X rays are generated from the spots irradiated with the light 5. Each of the X-ray sources is constituted of a plurality of very small light sources 6. The generated X rays 7 are projected upon an object 4 to be irradiated as X rays 8 through an illuminating optical system 3. Since the surface of the member 2 is formed in a curved surface, the light sources 6 exist on the curved surface. Therefore, the X rays 8 projected upon the object 4 become to illuminate the object 4 with uniform numerical apertures. |
