| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a ceramics pattern formation mold film with good reproducibility, by forming a film patterned of water repellent/oil repellent organic high polymer resin on a substrate, and packing such ceramics precursor as ceramics sol on such substrate surface as a void part of pattern film is exposed. SOLUTION: A resist resin film is formed of a photo-sensitive resist resin about several-several hundredsμm in thickness on a substrate 1, then, a fine pattern is formed with a resist resin pattern 2 in an exposure process (stage A). The resist resin pattern 2 is blocked by packing a water repellent/oil repellent organic high polymer resin 3 by thin-coating, etc., (stage B). Then, the resist resin pattern 2 and the water repellent/oil repellent organic high polymer resin 3 packed in its void part are dissolved in an organic solvent together with the substrate 1, for removing the resist resin. Further, a ceramics sol, etc., is packed on the surface of such substrate 1 as a void part of resin pattern film is exposed, then sintered to form a fine pattern with a sintered body 5.
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