METHOD FOR DETACHING ABSORBED BODY AND ELECTROSTATIC CHUCK AND PLASMA PROCESSOR

摘要

PROBLEM TO BE SOLVED: To quickly detach an absorbed object absorbed through an electrostatic chuck by neutralizing the charge of the electrostatic chuck with a neutralizing capacitor. SOLUTION: This method is provided with a neutralizing capacitor C2 having identical electrostatic capacity as that of a susceptor 15. When a substrate 14 to be processed is absorbed by the susceptor 15, an equivalent capacitor C1 of an electrostatic chuck 22 is charged by a DC power source 16, and the neutralizing capacitor C2 is also charged. When the processed substrate 14 is detached, the DC power source 16 is separated, and the neutralizing capacitor C2 is turned into reverse polarity, and then serially connected with the susceptor 15. Thus, the both edges of both the serially connected capacitor C1 and C2 are shorted via a ground, and the charge stored in the susceptor 15 and the processed substrate 14 is rapidly neutralized by the charge stored in the neutralizing capacitor C2 , so that the processed substrate 14 can be detached in a short time.