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发明名称
KNIFE EDGE TYPE DISPLACEMENT DETECTOR USING OPTICAL WAVEGUIDE
摘要
申请公布号
JPH1139673(A)
申请公布日期
1999.02.12
申请号
JP19970188192
申请日期
1997.07.14
申请人
NIKON CORP
发明人
IWASAKI YUTAKA
分类号
G01B11/00;G11B7/09;(IPC1-7):G11B7/09
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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