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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH1140811(A)
申请公布日期
1999.02.12
申请号
JP19970196206
申请日期
1997.07.22
申请人
HITACHI LTD
发明人
HORIUCHI KATSUTADA
分类号
H01L29/786;H01L21/336;H01L27/01;H01L27/12;H01L29/772;H01L31/0392;(IPC1-7):H01L29/786
主分类号
H01L29/786
代理机构
代理人
主权项
地址
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