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发明名称
Einrichtung zur Halterung eines Halbleiterplättchens
摘要
申请公布号
DE69322835(D1)
申请公布日期
1999.02.11
申请号
DE1993622835
申请日期
1993.10.05
申请人
SUMITOMO ELECTRIC INDUSTRIES, LTD., OSAKA, JP
发明人
UEDA, MINORU, C/O OSAKA WORKS OF SUMITOMO, KONOHANA-KU, OSAKA, JP
分类号
B23Q3/08;B25B11/00;B81C99/00;H01L21/683;(IPC1-7):H01L21/00
主分类号
B23Q3/08
代理机构
代理人
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