Method and apparatus for removing impurity by an improved electrode

摘要

A method and apparatus for removing an impurity by use of an electrode having a surface coated with a catalyst which is capable of decomposing an impurity into decomposition products. An impurity is ionized with photoelectron for attracting an ionized impurity toward an electrode applied with a voltage to capture the ionized impurity on the electrode. An captured impurity is decomposed by the catalyst into decomposition products whereby no ionized impurity is accumulated on the surface of the electrode.