| 摘要 |
PROBLEM TO BE SOLVED: To eliminate influence of difference in the peripheral speed by polishing a workpiece with a surface plate through utilization of a linear motion. SOLUTION: A pair of timing belts 13 are installed in opposing positions as pinching the working surface 2a of a surface plate 2 installed stationarily, and a workpiece holding member 3 in disc shape to hold a workpiece is supplied to between the timing belts 13, and these are driven in different directions at different speeds, and thereby linear transport on the working surface 2a is generated while the workpiece holding member 3 is rotated, and the workpiece held is polished. |
