发明名称 Method of producing articles by chemical vapor deposition and the support mandrels used therein
摘要 An improved method of producing a diamond tube by chemical vapor deposition and a hollow support mandrel used therein. The method comprises depositing a diamond film on an outer side of the hollow mandrel by the CVD process. The mandrel is then etched away by subjecting an inner side of the mandrel to the etching action. It was unexpectedly discovered that the etch time is drastically reduced by using the hollow mandrels.
申请公布号 US5869133(A) 申请公布日期 1999.02.09
申请号 US19930119448 申请日期 1993.09.09
申请人 GENERAL ELECTRIC COMPANY 发明人 ANTHONY, THOMAS RICHARD;ETTINGER, ROBERT HELMUT;FLEISCHER, JAMES FULTON
分类号 B24C5/04;C04B41/91;C23C16/01;C23C16/02;C23C16/26;C23C16/27;C23F1/00;(IPC1-7):C23C16/26;C23F1/26;B32B9/00 主分类号 B24C5/04
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