PZT THIN-FILM BIMORPH PARALLEL PLATE STRUCTURE AND ITS MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To provide a parallel plate structure of a thin-film bimorph which can obtain a large displacement when used as an actuator. SOLUTION: A parallel plate structure 1 is arranged so that piezo electric elements 2 as a pair of bimorph structures are fixed as opposed each other with an insulating spacer 3 of a rectangular column shape disposed therebetween at both upper and lower ends of the elements 2. The element 2 of the bimorph structure includes a base plate 4 of titanium, PZT thin films 5 having a thickness of several tens ofμm and formed by a hydrothermal synthesis method on both sides of the base plate 4, and a pair of electrode films 6 of aluminum having a thickness of severalμm and formed on the thin films 5.