| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain an electrostatic chuck which is refillable at a high temperature. SOLUTION: An electrostatic chuck 20 for holding a substrate 40 in a process chamber 70 contains a monocrystalline ceramic monolith 25 which an electrode embedded therein for electrostatically holding the substrate 40 upon application of a voltage thereto. The ceramic monolith 25 is made from a signal piece of monocrystalline ceramic which is formed by a melt-forming process or a plurality of monocrystalline ceramic plates 225 bonded one another. Another embodiment of the invention is an electrostatic chuck containing a monocrystalline ceramic layer 235 covering a mesh electrode 240 on an underlying dielectric layer 245. An electrical connector 50 extends through the monocrystalline ceramic monolith 25 or the underlying dielectric layer 245 so as to supply a voltage to an electrode 45. The monocrystalline ceramic monolithic structure 25 and the monocrystalline ceramic layer 235 contain desirably monocrystalline sapphire and the electrode 45 contains a refractory metal.</p> |
