APPARATUS FOR MOUNTING ELECTRON BEAM CELL PROJECTION MASK

摘要

PROBLEM TO BE SOLVED: To avoid damaging an electron beam cell projection mask by providing guide pins at corresponding positions of a pedestal to guide pin holes of a mask holder to removably settle the mask holder and temporary mask mount according to the guide pins. SOLUTION: The main body 2 has a pedestal 21 integrated with a moving table support 24 fixed above the pedestal 21 through supports 23, and a temporary mask mount 4 is disposed on the pedestal 21 and formed in the same shape as that of a mask holder 5 and has guide pin holes 41 and temporary mask mounting groove 42 at positions corresponding to guide pin holes 51 and mask mounting hole 52 of the holder 5. An electron beam cell projection mask 7 is mounted in the grooves 42 and the mask holder 5 is removably fixed to the mount 4 with the guide pins 22 fitted in the guide pin holes 51, 42.