| 摘要 |
PROBLEM TO BE SOLVED: To obtain the positive radiation sensitivity resin composition especially excellent in sensitivity and improved in resolution and focus latitude and the like and useful as resist by using an alkali-soluble resin obtained by polycondensing phenol and at least one kind of xylenol with an aldehyde compound. SOLUTION: The radiation sensitive resin composition contains a quinonediazido compound and the alkali-soluble resin obtained by polycondensing the phenol and at least one kind of xylenol with an aldehyde compound. As the xylenol, 3,5-xylenol and 2,3-xylenol and the like are enumerated, and a preferable combination of phenol and xylenol is embodied by phenol and 2,3- xylenol, and as the aldehyde compound, formaldehyde and trioxane and the like, and it is used in an amount of 0.5-2.0 mol per 1 mol of the phenolic compounds. |
