Integrierte Varactor- und piezoelektrische Vorrichtung für akustisches Farbdrucken

摘要

An integrated varactor and piezoelectric device (130) for an acoustic ink jet ejector (100) includes a silicon substrate (102) having a first surface, the silicon substrate forming a first electrode, an epitaxial layer (132) formed over the first surface of the silicon substrate, a silicon dioxide layer (134) formed over the epitaxial layer, a second electrode (104) formed over the silicon dioxide, a piezoelectric layer (106) formed over the second electrode, a third electrode (32) formed over the piezoelectric layer and an acoustic lens (108) formed over a second surface of the silicon substrate. The acoustic lens is aligned with the center of the piezoelectric layer generally along an axis perpendicular to the first and second surfaces of the silicon substrate.